Patents/Inventors

Vitaliy Shklover

HeidenheimDE2 patents

3 Patents

US122102892025
Mirror, in Particular for a Microlithographic Projection Exposure Apparatus
CARL ZEISS SMT GmbH
0 cites
US119827882024
Method for Forming Nanostructures on a Surface and Optical Element
CARL ZEISS SMT GmbH
0 cites
US116812362023
Method for In-situ Dynamic Protection of a Surface and Optical Assembly
CARL ZEISS SMT GmbH
0 cites