Patents/Inventors

Vincent Claude Beugin

NootdorpNL3 patents

2 Patents

US125623342026
Multi-beam Charged Particle Column
ASML Netherlands B.V.
0 cites
US125557402026
Charged Particle System, Aperture Array, Charged Particle Tool and Method of Operating a Charged Particle System
ASML Netherlands B.V.
0 cites