Patents/Inventors

Vincent Burkhart

Cupertino, CAUS2 patents

3 Patents

US122437252025
High Temperature RF Connection with Integral Thermal Choke
Lam Research Corporation
0 cites
US119903602024
Electrostatic Chuck (ESC) Pedestal Voltage Isolation
Lam Research Corporation
0 cites
US118358682023
Protective Coating for Electrostatic Chucks
Lam Research Corporation
0 cites