Patents/Inventors

Vinay K. Prabhakar

Fremont, CAUS18 patents

16 Patents

US125639912026
Thermal Choke Plate
Applied Materials, Inc.
0 cites
US125572542026
Two-piece RF Shield Design
Applied Materials, Inc.
0 cites
US124244142025
Semiconductor Processing System with a Manifold for Equal Splitting and Common Divert Architecture
Applied Materials, Inc.
0 cites
US122665502025
Multiple Process Semiconductor Processing System
Applied Materials, Inc.
0 cites
US122117282025
Electrostatic Chuck Design with Improved Chucking and Arcing Performance
Applied Materials, Inc.
0 cites
US121911152025
Dual RF for Controllable Film Deposition
Applied Materials, Inc.
0 cites
US121365492024
Plasma-enhanced Chemical Vapor Deposition of Carbon Hard-mask
APPLIED MATERIALS, Inc.
0 cites
US120000482024
Pedestal for Substrate Processing Chambers
Applied Materials, Inc.
0 cites
US119843052024
Substrate Pedestal for Improved Substrate Processing
Applied Materials, Inc.
0 cites
US118759692024
Process Chamber with Reduced Plasma Arc
Applied Materials, Inc.
0 cites
US118307062023
Heated Pedestal Design for Improved Heat Transfer and Temperature Uniformity
Applied Materials, Inc.
0 cites
US116825742023
Electrostatic Chuck Design with Improved Chucking and Arcing Performance
Applied Materials, Inc.
0 cites
US115849942023
Pedestal for Substrate Processing Chambers
Applied Materials, Inc.
0 cites
US115877732023
Substrate Pedestal for Improved Substrate Processing
Applied Materials, Inc.
0 cites
US115690722023
RF Grounding Configuration for Pedestals
APPLIED MATERIALS, Inc.
0 cites
US115606232023
Methods of Reducing Chamber Residues
Applied Materials, Inc.
0 cites