Patents/Inventors

Vilen K. Nestorov

Pleasanton, CAUS6 patents

6 Patents

US121966172025
Temperature Profile Measurement and Synchronized Control on Substrate and Susceptor in an Epitaxy Chamber
Applied Materials, Inc.
0 cites
US121989222025
Lamp Filament Having a Pitch Gradient and Method of Making
APPLIED MATERIALS, Inc.
0 cites
US121659342024
Substrate Processing Monitoring
Applied Materials, Inc.
0 cites
US120273882024
Conical Coil for Rapid Thermal Anneal Lamps
Applied Materials, Inc.
0 cites
US117619012023
Apparatus and Method for Inspecting Lamps
Applied Materials, Inc.
0 cites
US115629152023
Methods, Systems, and Apparatus for Optically Monitoring Individual Lamps
Applied Materials, Inc.
0 cites