Patents/Inventors

Vikrant Rai

Sherwood, ORUS3 patents

3 Patents

US125776662026
Precursor Dispensing Systems with Line Charge Volume Containers for Atomic Layer Deposition
Lam Research Corporation
0 cites
US122304952025
Method of Depositing Silicon Nitride Films
LAM RESEARCH CORPORATION
0 cites
US118325332023
Conformal Damage-free Encapsulation of Chalcogenide Materials
Lam Research Corporation
0 cites