Patents/Inventors

Vikas Giridhar Telkar

Escondido, CAUS1 patent

2 Patents

US122950882025
Hybrid Droplet Generator for Extreme Ultraviolet Light Sources in Lithographic Radiation Systems
ASML Netherlands B.V.
0 cites
US122220502025
Robust Fluid Coupling Apparatus
ASML Netherlands B.V.
0 cites