Patents/Inventors

Vijay D. Parkhe

San Jose, CAUS34 patents

36 Patents

USRE0508382026
Electrostatic Chuck Assembly for High Temperature Processes
Applied Materials, Inc.
0 cites
USRE0508212026
Electrostatic Chuck Assembly for High Temperature Processes
Applied Materials, Inc.
0 cites
US124933032025
Increasing the Gas Efficiency for an Electrostatic Chuck
Applied Materials, Inc.
0 cites
US124889672025
Extreme Uniformity Heated Substrate Support Assembly
Applied Materials, Inc.
0 cites
US124761312025
Semiconductor Substrate Support with Internal Channels
Applied Materials, Inc.
0 cites
US124244812025
Modular Substrate Support Assembly
Applied Materials, Inc.
0 cites
US124008962025
Fabrication of Substrate Support Devices Using Inorganic Dielectric Bonding
Applied Materials, Inc.
0 cites
US123476592025
Electrostatic Chuck Assembly for Cryogenic Applications
Applied Materials, Inc.
0 cites
US123319842025
Cryogenic Micro-zone Electrostatic Chuck Connector Assembly
Applied Materials, Inc.
0 cites
US123343152025
Cooled Substrate Support Assembly for Radio Frequency Environments
Applied Materials, Inc.
0 cites
US123343852025
Tunable Temperature Controlled Substrate Support Assembly
Applied Materials, Inc.
0 cites
US122437562025
Temperature Controlled Substrate Support Assembly
Applied Materials, Inc.
0 cites
US122241982025
Electrostatic Chuck with Mesas
Applied Materials, Inc.
0 cites
US122058432025
Ground Electrode Formed in an Electrostatic Chuck for a Plasma Processing Chamber
Applied Materials, Inc.
0 cites
US121257282024
Substrate Carrier
APPLIED MATERIALS, Inc.
0 cites
US121257342024
Vacuum Seal for Electrostatic Chuck
Applied Materials, Inc.
0 cites
US120976652024
Porous Plug Bonding
APPLIED MATERIALS, Inc.
0 cites
US120572982024
Apparatus for Fiber Optic Temperature Probe in Processing Chambers
Applied Materials, Inc.
0 cites
US120338372024
Electrostatic Chuck Assembly for Cryogenic Applications
APPLIED MATERIALS, Inc.
0 cites
US120209122024
Integrated Electrode and Ground Plane for a Substrate Support
0 cites
US120092442024
Tunable Temperature Controlled Substrate Support Assembly
Applied Materials, Inc.
0 cites
US119553612024
Electrostatic Chuck with Mesas
Applied Materials, Inc.
0 cites
US119488262024
High Power Electrostatic Chuck Design with Radio Frequency Coupling
Applied Materials, Inc.
0 cites
US118814232024
Electrostatic Chuck with Metal Bond
Applied Materials, Inc.
0 cites
US118188102023
Heater Assembly with Purge Gap Control and Temperature Uniformity for Batch Processing Chambers
APPLIED MATERIALS, Inc.
0 cites
US117944412023
Bonding Structure of E Chuck to Aluminum Base Configuration
Applied Materials, Inc.
0 cites
US117840802023
High Temperature Micro-zone Electrostatic Chuck
Applied Materials, Inc.
0 cites
US117767942023
Electrostatic Chuck Assembly for Cryogenic Applications
APPLIED MATERIALS, Inc.
0 cites
US117768222023
Wet Cleaning of Electrostatic Chuck
Applied Materials, Inc.
0 cites
US117696832023
Chamber Component with Protective Ceramic Coating Containing Yttrium, Aluminum and Oxygen
Applied Materials, Inc.
0 cites
US117696842023
Wafer Heater with Backside and Integrated Bevel Purge
Applied Materials, Inc.
0 cites
US117478342023
Increasing the Gas Efficiency for an Electrostatic Chuck
Applied Materials, Inc.
0 cites
US117422252023
Electrostatic Puck Assembly with Metal Bonded Backing Plate
Applied Materials, Inc.
0 cites
US116768492023
Substrate Carrier
APPLIED MATERIALS, Inc.
0 cites
US116409172023
Ground Electrode Formed in an Electrostatic Chuck for a Plasma Processing Chamber
Applied Materials, Inc.
0 cites
US115575002023
High Temperature Heated Support Pedestal in a Dual Load Lock Configuration
Applied Materials, Inc.
0 cites