9 Patents
- US125675722026Plasma Behaviors Predicted by Current Measurements During Asymmetric Bias Waveform Application
Advanced Energy Industries, Inc.
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- US123548362025System, Method, and Apparatus for Controlling Ion Energy Distribution in Plasma Processing Systems
Advanced Energy Industries, Inc.
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- US121424522024Systems and Methods for Monitoring Faults, Anomalies, and Other Characteristics of a Switched Mode Ion Energy Distribution System
Advanced Energy Industries, Inc.
0 cites - 0 cites
- US116159412023System, Method, and Apparatus for Controlling Ion Energy Distribution in Plasma Processing Systems
Advanced Energy Industries, Inc.
0 cites