Patents/Inventors

Viachslav Babayan

Sunnyvale, CAUS3 patents

3 Patents

US120573292024
Selective Etch Using Material Modification and RF Pulsing
Applied Materials, Inc.
0 cites
US118993662024
Method and Apparatus for Post Exposure Processing of Photoresist Wafers
Applied Materials, Inc.
0 cites
US115502242023
Apparatus for Post Exposure Bake
Applied Materials, Inc.
0 cites