18 Patents
- 0 cites
- 0 cites
- US122117282025Electrostatic Chuck Design with Improved Chucking and Arcing Performance
Applied Materials, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- US118307062023Heated Pedestal Design for Improved Heat Transfer and Temperature Uniformity
Applied Materials, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites
- US116825742023Electrostatic Chuck Design with Improved Chucking and Arcing Performance
Applied Materials, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites