Van H. Nguyen

3 Patents

• US124540362025

  Substrate Handling Systems and Methods for CMP Processing

  Applied Materials, Inc.

  0 cites
• US119118692024

  Chemical Mechanical Polishing System with Platen Temperature Control

  Applied Materials, Inc.

  0 cites
• US118507002023

  Sequential Application of Cleaning Fluids for Improved Maintenance of Chemical Mechanical Polishing Systems

  Applied Materials, Inc.

  0 cites