Patents/Inventors

Valentin Jonatan Bolsinger

AalenDE2 patents

3 Patents

US124431092025
EUV Collector
Carl Zeiss SMT GmbH
0 cites
US123862632025
Reflective Optical Element, Illumination Optical Unit, Projection Exposure Apparatus, and Method for Producing a Protective Layer
CARL ZEISS SMT GmbH
0 cites
US123266632025
Optical Component
Carl Zeiss SMT GmbH
0 cites