4 Patents
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- US117142762023Microelectromechanical System (MEMS) Scanner Having a Torsional Beam Flexure with Variable Width
MICROSOFT TECHNOLOGY LICENSING, LLC
0 cites - US116932332023Microelectromechanical System (MEMS) Scanner Having Actuator Pairs Cantilevered Adjacent to Opposite Sides of a Scanning Mirror
MICROSOFT TECHNOLOGY LICENSING, LLC
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