Patents/Inventors

Umesh M. Kelkar

Santa Clara, CAUS3 patents

4 Patents

US118307062023
Heated Pedestal Design for Improved Heat Transfer and Temperature Uniformity
Applied Materials, Inc.
0 cites
US118107662023
Protection of Aluminum Process Chamber Components
Applied Materials, Inc.
0 cites
US115916892023
Method for Fabricating Chamber Parts
Applied Materials, Inc.
0 cites
US115690692023
3D Printed Chamber Components Configured for Lower Film Stress and Lower Operating Temperature
APPLIED MATERIALS, Inc.
0 cites