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Inventors
Ulrich Welling
Aschheim/Dornach
DE
2 patents
2 Patents
US11914306
2024
Predicting Defect Rate Based on Lithographic Model Parameters
Synopsys, Inc.
0 cites
US11900042
2024
Stochastic-aware Lithographic Models for Mask Synthesis
Synopsys, Inc.
0 cites