Patents/Inventors

Ulrich Pohlmann

JenaDE4 patents

5 Patents

US120558592024
Overlay Mark Design for Electron Beam Overlay
0 cites
US118625242024
Overlay Mark Design for Electron Beam Overlay
0 cites
US117200312023
Overlay Design for Electron Beam and Scatterometry Overlay Measurements
KLA Corporation
0 cites
US117037672023
Overlay Mark Design for Electron Beam Overlay
0 cites
US116370302023
Multi-stage, Multi-zone Substrate Positioning Systems
KLA Corporation
0 cites