Patents/Inventors

Ulrich Niemann

San Diego, CAUS4 patents

3 Patents

US125977532026
Packed-bed Filter for Metal Fluoride Dust Trapping in Laser Discharge Chambers
Cymer, LLC
0 cites
US118067132023
Microfluidic System Based on Active Control of Flow Resistance in Microfluidic Channels and Methods of Use Thereof
0 cites
US116140122023
Nonwoven Screens for Dust Trapping in Laser Discharge Chambers
Cymer, LLC
0 cites