Patents/Inventors

Ulrich Matejka

JenaDE7 patents

6 Patents

US126075702026
Sensor Arrangement for Arrangement on a Measurement Chamber, Apparatus for Qualifying a Mask and Method for Qualifying a Mask
Carl Zeiss SMT GmbH
0 cites
US125720852026
Device and Method for Measuring Substrates for Semiconductor Lithography
Carl Zeiss SMT GmbH
0 cites
US119143032024
Apparatus and Method for Characterizing a Microlithographic Mask
Carl Zeiss SMT GmbH
0 cites
US118927692024
Method for Detecting an Object Structure and Apparatus for Carrying Out the Method
Carl Zeiss SMT GmbH
0 cites
US117965632023
Apparatus and Method for a Scanning Probe Microscope
Carl Zeiss SMT GmbH
0 cites
US116198822023
Method and Apparatus for Characterizing a Microlithographic Mask
Carl Zeiss SMT GmbH
0 cites