Ulrich Bihr

3 Patents

• US126092822026

  Multi-beam Charged Particle System and Method of Controlling the Working Distance in a Multi-beam Charged Particle System

  Carl Zeiss Multisem GmbH

  0 cites
• US125867492026

  Certain Improvements of Multi-beam Generating and Multi-beam Deflecting Units

  Carl Zeiss Multisem GmbH

  0 cites
• US122550402025

  Multi-beam Particle Beam System and Method for Operating Same

  Carl Zeiss Multisem GmbH

  0 cites