Tzung-hua Lin

2 Patents

• US123157372025

  Feature Patterning Using Pitch Relaxation and Directional End-pushing with Ion Bombardment

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US116886102023

  Feature Patterning Using Pitch Relaxation and Directional End-pushing with Ion Bombardment

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites