Patents/Inventors

Tzung-chi Fu

MiaoliTW18 patents

21 Patents

US123548672025
Particle Removal Apparatus
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123479972025
Methods and Systems for Aligning Master Oscillator Power Amplifier Systems
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US122355942025
Method for Performing Lithography Process, Light Source, and EUV Lithography System
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121893112025
Reticle Carrier and Associated Methods
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US121675252024
EUV Light Source and Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121241782024
Lithography System and Method
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US120993102024
System and Method for Cleaning an EUV Mask
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US119829442024
Method of Lithography Process and Transferring a Reticle
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119843142024
Particle Removal Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119733022024
Methods and Systems for Aligning Master Oscillator Power Amplifier Systems
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US118323722023
EUV Light Source and Apparatus for Lithography
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117372002023
Residual Gain Monitoring and Reduction for EUV Drive Laser
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd
0 cites
US117231412023
EUV Radiation Generation Methods and Systems
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117037632023
Method of Lithography Process Using Reticle Container with Discharging Device
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US117037692023
Light Source, EUV Lithography System, and Method for Performing Circuit Layout Patterning Process
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US116985912023
System and Method of Discharging an EUV Mask
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US116870112023
Reticle Carrier and Associated Methods
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US116812342023
Mask for Attracting Charged Particles and Method for Using the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US116812352023
System and Method for Cleaning an EUV Mask
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US116752802023
Lithography System and Method
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US115882932023
Methods and Systems for Aligning Master Oscillator Power Amplifier Systems
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites