Tz-shian Chen

3 Patents

• US124697172025

  Systems, Methods, and Semiconductor Devices

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US123990672025

  Apparatus, System, and Method for Measuring the Temperature of a Substrate

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US120740262024

  Integrated Photoresist Removal and Laser Annealing

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites