Patents/Inventors

Tuqiang Ni

ShanghaiCN10 patents

10 Patents

US123410372025
Temperature Control Apparatus for Semiconductor Processing Equipment, and Temperature Control Method for the Same
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites
US123098912025
Control Method for Multi-zone Active-matrix Temperature Control in Plasma Processing Apparatus
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites
US122610122025
Plasma Treatment Apparatus, Lower Electrode Assembly and Forming Method Thereof
ADVANCED MICRO-FABRICATION EQUIPMENT Inc.
0 cites
US120946952024
Multi-zone Temperature Control Plasma Reactor
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites
US120625242024
Plasma Reactor Having a Variable Coupling of Low Frequency RF Power to an Annular Electrode
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites
US116825412023
Radio Frequency Power Supply System, Plasma Processor, and Frequency-tuning Matching
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites
US116768032023
Liner Assembly for Vacuum Treatment Apparatus, and Vacuum Treatment Apparatus
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites
US116705152023
Capacitively Coupled Plasma Etching Apparatus
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites
US116263142023
Lift Pin Assembly, an Electrostatic Chuck and a Processing Apparatus Where the Electrostatic Chuck Is Located
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites
US115453422023
Plasma Processor and Processing Method
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites