Patents/Inventors

Tuck Foong Koh

SingaporeRS13 patents

9 Patents

US126221922026
Methods of Selectively Etching Silicon Nitride
Applied Materials, Inc.
0 cites
US124760862025
Spray-coated Electrostatic Chuck Design
Applied Materials, Inc.
0 cites
US124380052025
Low Temperature Selective Etching of Silicon Nitride Using Microwave Plasma
Applied Materials, Inc.
0 cites
US123157392025
Isotropic Silicon Nitride Removal
Applied Materials, Inc.
0 cites
US120572992024
Methods for Selective Removal of Contact Oxides
APPLIED MATERIALS, Inc.
0 cites
US116705132023
Apparatus and Systems for Substrate Processing for Lowering Contact Resistance
APPLIED MATERIALS, Inc.
0 cites
US116294092023
Inline Microwave Batch Degas Chamber
APPLIED MATERIALS, Inc.
0 cites
US116108072023
Methods and Apparatus for Cleaving of Semiconductor Substrates
APPLIED MATERIALS, Inc.
0 cites
US115691222023
Methods and Apparatus for Cleaving of Semiconductor Substrates
APPLIED MATERIALS, Inc.
0 cites