Patents/Inventors

Tu Hong

Tualatin, ORUS3 patents

3 Patents

US125657012026
Undercoating Coverage and Resistance Control for ESCS of Substrate Processing Systems
Lam Research Corporation
0 cites
US125001142025
Wafer Lift Pin Mechanism for Preventing Local Backside Deposition
LAM RESEARCH CORPORATION
0 cites
US120149212024
Plasma Enhanced Wafer Soak for Thin Film Deposition
Lam Research Corporation
0 cites