13 Patents
- US125557522026Substrate Processing Apparatus, Electrode Structure and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites - US124924762025Substrate Processing Apparatus, Method of Processing Substrate, Method of Manufacturing Semiconductor Device, and Plasma Generation Device Preliminary
KOKUSAI ELECTRIC CORPORATION
0 cites - US124889622025Substrate Processing Apparatus, Plasma Generating Apparatus, and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites - US124630172025Substrate Processing Apparatus, Plasma Light Emitting Apparatus and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites - US124008402025Substrate Processing Apparatus, Substrate Holder, and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites - US120947352024Substrate Processing Apparatus, Plurality of Electrodes and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites - US120681362024Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Plasma Generator
KOKUSAI ELECTRIC CORPORATION
0 cites - US119674902024Plasma Generating Device, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites - US119617152024Substrate Processing Apparatus, Substrate Retainer and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites - US118043652023Substrate Processing Apparatus, Plasma Generating Apparatus, and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites - US117495102023Plasma Generating Device, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites - US116294082023Plasma Generation Device, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites - US115519142023Plasma Generating Device, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites