Patents/Inventors

Tsuyoshi Moriya

TokyoJP7 patents

8 Patents

US124826352025
Plasma Processing Device, and Plasma Processing Method
Tokyo Electron Limited
0 cites
US123593082025
Film Forming Method and Semiconductor Production Apparatus
Tokyo Electron Limited
0 cites
US120606352024
Hard Mask, Substrate Processing Method, and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US120273442024
Film Forming Apparatus
Tokyo Electron Limited
0 cites
US120209002024
Plasma Processing Device, and Plasma Processing Method
Tokyo Electron Limited
0 cites
US119938492024
Carbon Hard Mask, Film Forming Apparatus, and Film Forming Method
National University Corporation Tokai National Higher Education And Research System
0 cites
US117761052023
Contaminant Detection System, Contaminant Detecting Method, and Semiconductor Manufacturing Apparatus
Tokyo Electron Limited
0 cites
US117215572023
Etching Method
Tokyo Electron Limited
0 cites