Patents/Inventors

Tsutomu Terao

TochigiJP4 patents

5 Patents

US124364712025
Control Apparatus, Lithography Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US121693682024
Positioning Apparatus, Lithography Apparatus and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US121408762024
Processing Apparatus and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US118290792023
Positioning Apparatus, Lithography Apparatus and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US116812162023
Imprint Apparatus, Imprint Method, Article Manufacturing Method, Molding Apparatus, and Molding Method
CANON KABUSHIKI KAISHA
0 cites