Patents/Inventors

Tsung-lung Lai

HsinchuTW6 patents

6 Patents

US123114982025
Monolithic Platen
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US122371792025
Fittings for Wafer Cleaning Systems
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119754212024
Single Bodied Platen Housing a Detection Module for CMP Systems
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US119191262024
Monolithic Platen
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US118507022023
Chemical Mechanical Planarization Membrane
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US115717822023
Single Bodied Platen Housing a Detection Module for CMP Systems
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites