Patents/Inventors

Tsuneyuki Okabe

Nirasaki CityJP9 patents

7 Patents

US126069102026
Substrate Processing Apparatus, Processing Gas Concentrating Apparatus, and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US125710962026
Raw Material Gas Supply System and Raw Material Gas Supply Method
Tokyo Electron Limited
0 cites
US125291382026
Substrate Processing Apparatus, Raw Material Cartridge, Substrate Processing Method, and Raw Material Cartridge Manufacturing Method
TOKYO ELECTRON LIMITED
0 cites
US125037632025
Substrate Processing Apparatus and Substrate Processing Method
Tokyo Electron Limited
0 cites
US123659852025
Deposition Apparatus with Pressure Sensor and Shower Head on Same Plane and Deposition Method
Tokyo Electron Limited
0 cites
US119652422024
Raw Material Supply Apparatus and Raw Material Supply Method
TOKYO ELECTRON LIMITED
0 cites
US117740152023
Pipe Joint
FUJIKIN INCORPORATED
0 cites