Patents/Inventors

Tsuneo Terasawa

JoetsuJP5 patents

6 Patents

US121817902024
Reflective Mask Blank and Reflective Mask
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US119403912024
Defect Inspection Apparatus, Method for Inspecting Defect, and Method for Manufacturing Photomask Blank
SHIN-ETSU CHEMICAL CO., Ltd.
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US118605292024
Substrate with Multilayer Reflection Film for EUV Mask Blank, Manufacturing Method Thereof, and EUV Mask Blank
SHIN-ETSU CHEMICAL CO., Ltd.
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US118358512023
Substrate with Multilayer Reflection Film for EUV Mask Blank, Manufacturing Method Thereof, and EUV Mask Blank
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US117893572023
Method of Manufacturing Reflective Mask Blank, and Reflective Mask Blank
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US116247122023
Substrate Defect Inspection Method and Substrate Defect Inspection Apparatus
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites