Patents/Inventors

Tsunenaga Nakashima

KoshiJP5 patents

5 Patents

US125575912026
Linearly Moving Mechanism and Method of Suppressing Particle Scattering
TOKYO ELECTRON LIMITED
0 cites
US123984612025
Substrate Cleaning Apparatus and Substrate Cleaning Method
TOKYO ELECTRON LIMITED
0 cites
US121319192024
Substrate Cleaning Apparatus and Substrate Cleaning Method
TOKYO ELECTRON LIMITED
0 cites
US118655902024
Substrate Cleaning Method, Processing Container Cleaning Method, and Substrate Processing Device
Tokyo Electron Limited
0 cites
US116303922023
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites