Patents/Inventors

Tsun-cheng Tang

HsinchuTW2 patents

3 Patents

US123994402025
Lithography System and Methods
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US119534482024
Method for Defect Inspection
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites
US115674002023
Method of Fabricating a Photomask and Method of Inspecting a Photomask
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites