Patents/Inventors

Tsukasa Kamakura

ToyamaJP10 patents

10 Patents

US125403882026
Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
US122495032025
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US122179592025
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
US120538052024
Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US119675342024
Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US118482012023
Method of Manufacturing Semiconductor Device, Recording Medium, and Substrate Processing Method
KOKUSAI ELECTRIC CORPORATION
0 cites
US118107812023
Method of Processing Substrate, Substrate Processing Apparatus, Recording Medium, Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US117640562023
Method of Processing Substrate, Substrate Processing Apparatus, Recording Medium, Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US117264562023
Substrate Processing System
Kokusai Electric Corporation
0 cites
US117281622023
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites