Patents/Inventors

Tsukasa Hirayama

MiyagiJP11 patents

3 Patents

US126032542026
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US125753502026
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US122725262025
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites