Patents/Inventors

Tsuguto Sugawara

MiyagiJP3 patents

4 Patents

US122939032025
Substrate Support and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US122725282025
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119357292024
Substrate Support and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US119086662024
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites