Tsubasa Nanao

3 Patents

• US126092782026

  Multi Charged Particle Beam Writing Method and Multi Charged Particle Beam Writing Apparatus

  Nuflare Technology, Inc.

  0 cites
• US118043602023

  Multi Charged Particle Beam Adjustment Method, Multi Charged Particle Beam Irradiation Method, and Multi Charged Particle Beam Irradiation Apparatus

  Nuflare Technology, Inc.

  0 cites
• US117405462023

  Multi Charged Particle Beam Writing Apparatus and Method of Adjusting Same

  Nuflare Technology, Inc.

  0 cites