Patents/Inventors

Tse-an Yeh

TaipeiTW1 patent

2 Patents

US124497282025
High Quantum Efficiency Dry Resist for Low Exposure Dose of EUV Radiation
ENTEGRIS, Inc.
0 cites
US120789212024
Phase-shift Reticle for Use in Photolithography
ENTEGRIS, Inc.
0 cites