Patents/Inventors

Troy Alan Gomm

Sherwood, ORUS3 patents

4 Patents

US123984642025
Substrate Pedestal Including Backside Gas-delivery Tube
Lam Research Corporation
0 cites
US123879652025
Electrostatic Chuck for Use in Semiconductor Processing
Lam Research Corporation
0 cites
US118173412023
Electrostatic Chuck for Use in Semiconductor Processing
Lam Research Corporation
0 cites
US116348172023
Substrate Pedestal Including Backside Gas-delivery Tube
Lam Research Corporation
0 cites