Patents/Inventors

Toyohisa Tsuruda

KumamotoJP12 patents

13 Patents

US124677422025
Film Thickness Analysis Method, Film Thickness Analysis Device and Storage Medium
TOKYO ELECTRON LIMITED
0 cites
US124426352025
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium
Tokyo Electron Limited
0 cites
US124063502025
Estimation Model Creation Device, Estimation Model Creation Method, and Storage Medium
Tokyo Electron Limited
0 cites
US123005262025
Substrate Processing Control Method, Substrate Processing Apparatus and Storage Medium
TOKYO ELECTRON LIMITED
0 cites
US122283902025
Information Processing Apparatus, Information Processing Method and Computer-readable Recording Medium
TOKYO ELECTRON LIMITED
0 cites
US121237782024
Thermal Imaging Sensor for Integration Into Track System
Tokyo Electron Limited
0 cites
US120511892024
Estimation Model Creation Device, Estimation Model Creation Method, and Storage Medium
Tokyo Electron Limited
0 cites
US118760222024
Substrate Treatment Method and Substrate Treatment System
Tokyo Electron Limited
0 cites
US118624962024
Substrate Processing Control Method, Substrate Processing Apparatus and Storage Medium
TOKYO ELECTRON LIMITED
0 cites
US117034592023
System and Method to Calibrate a Plurality of Wafer Inspection System (WIS) Modules
Tokyo Electron Limited
0 cites
US116365792023
Information Processing Method, Information Processing Apparatus and Computer-readable Recording Medium
TOKYO ELECTRON LIMITED
0 cites
US115556912023
Substrate Inspection System, Substrate Inspection Method and Recording Medium
TOKYO ELECTRON LIMITED
0 cites
US115448642023
Shape Characteristic Value Estimation Apparatus, Shape Characteristic Value Estimation Method, and Storage Medium
TOKYO ELECTRON LIMITED
0 cites