Patents/Inventors

Toshio Takagi

YamanashiJP6 patents

5 Patents

US125842202026
Showerhead and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US125447202026
Method for Producing Gas Separation Membrane, and Gas Separation Membrane
Shinshu University
0 cites
US121881252025
Showerhead and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US120904482024
Carbon Material and Method for Producing Carbon Material
Shinshu University
0 cites
US117323572023
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites