Toshio Hasegawa

8 Patents

• US126010482026

  Film Forming Method and Film Forming Apparatus

  TOKYO ELECTRON LIMITED

  0 cites
• US125097702025

  Film Forming Method and Film Forming Apparatus

  Tokyo Electron Limited

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• US124943692025

  Extreme Ultraviolet Lithography Patterning Method

  Tokyo Electron Limited

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• US124342252025

  Catalyst and a Process for the Production of Ethylenically Unsaturated Carboxylic Acids or Esters

  MITSUBISHI CHEMICAL UK LIMITED

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• US124045822025

  Method and Apparatus for Embedding Ruthenium in Recess Formed on Substrate Surface

  TOKYO ELECTRON LIMITED

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• US121029812024

  Catalyst, Method for Preparing Catalyst, and Method for Producing Unsaturated Carboxylic Acid And/or Unsaturated Carboxylic Acid Ester

  Mitsubishi Chemical Corporation

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• US119159312024

  Extreme Ultraviolet Lithography Patterning Method

  Tokyo Electron Limited

  0 cites
• US118735602024

  Abnormality Detection System and Control Board

  TOKYO ELECTRON LIMITED

  0 cites