Patents/Inventors

Toshinari Arai

YokohamaJP4 patents

3 Patents

US125557392026
Differential Pumping Apparatus and Focused Charged Particle Beam System
V TECHNOLOGY CO., Ltd.
0 cites
US125371642026
Process Apparatus Including Differential Pumping Device and Focused Ion Beam Column
V TECHNOLOGY CO., Ltd.
0 cites
US124445672025
Focused Charged Particle Beam Apparatus
V TECHNOLOGY CO., Ltd.
0 cites