Patents/Inventors

Toshimitsu Barada

TokyoJP1 patent

2 Patents

US124549782025
Magnetic Bearing Apparatus with Axial Pole Segments
EBARA CORPORATION
0 cites
US117312412023
Substrate Rotation Device, Substrate Cleaning Device, Substrate Processing Device, and Control Method for Substrate Rotation Device
EBARA CORPORATION
0 cites