Patents/Inventors

Toshiki Kanaki

Albany, NYUS3 patents

3 Patents

US125936342026
Selective Gas Phase Etch of Silicon Germanium Alloys
TOKYO ELECTRON LIMITED
0 cites
US124446142025
Etch Selectivity Modulation by Fluorocarbon Treatment
Tokyo Electron Limited
0 cites
US121424952024
Etching Method and Etching Apparatus
TOKYO ELECTRON LIMITED
0 cites