Patents/Inventors

Toshihiro Kitao

SapporoJP3 patents

4 Patents

US123004772025
Autonomous Operation of Plasma Processing Tool
Tokyo Electron Limited
0 cites
US121121072024
Virtual Metrology for Wafer Result Prediction
Tokyo Electron Limited
0 cites
US118697562024
Virtual Metrology Enhanced Plasma Process Optimization Method
Tokyo Electron Limited
0 cites
US116690792023
Tool Health Monitoring and Classifications with Virtual Metrology and Incoming Wafer Monitoring Enhancements
Tokyo Electron Limited
0 cites