Patents/Inventors

Toshihiko Iwao

Austin, TXUS5 patents

6 Patents

US123879192025
ALD Process with Plasma Treatment
Tokyo Electron Limited
0 cites
US123004662025
Plasma Enhanced Film Formation Method
TOKYO ELECTRON LIMITED
0 cites
US121762042024
Cyclic Low Temperature Film Growth Processes
Tokyo Electron Limited
0 cites
US119962682024
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US117734842023
Hard Mask Deposition Using Direct Current Superimposed Radio Frequency Plasma
TOKYO ELECTRON LIMITED
0 cites
US116055362023
Cyclic Low Temperature Film Growth Processes
Tokyo Electron Limited
0 cites