Patents/Inventors

Toshiaki Kodama

Nirasaki CityJP16 patents

9 Patents

US126046982026
Substrate Processing System and State Monitoring Method
Tokyo Electron Limited
0 cites
US124612122025
Substrate Processing System and Method of Estimating Height of Annular Member
Tokyo Electron Limited
0 cites
US124409712025
Apparatus for Transporting Substrate, System for Processing Substrate, and Method of Transporting Substrate
Tokyo Electron Limited
0 cites
US123622152025
Apparatus for Transferring Substrate and Method for Transferring Substrate
Tokyo Electron Limited
0 cites
US122495272025
Substrate Transport Apparatus and Substrate Transport Method
Tokyo Electron Limited
0 cites
US121425062024
Substrate Transfer Apparatus, Substrate Processing System and Substrate Processing Method
Tokyo Electron Limited
0 cites
US120092402024
Apparatus for Transporting Substrate, System for Processing Substrate, and Method of Transporting Substrate
Tokyo Electron Limited
0 cites
US119232222024
Substrate Transfer Device and Substrate Gripping Determination Method
Tokyo Electron Limited
0 cites
US118507432023
Transport Apparatus, Semiconductor Manufacturing Apparatus, and Transport Method
TOKYO ELECTRON LIMITED
0 cites