Patents/Inventors

Toru Maruyama

TokyoJP13 patents

12 Patents

US124726012025
Method of Checking Leakage of Fluid and Polishing Apparatus
EBARA CORPORATION
0 cites
US122016032025
Bicyclic Compound and Use Thereof for Medical Purposes
ONO PHARMACEUTICAL CO., Ltd.
0 cites
US120625632024
Substrate Processing Apparatus, Substrate Processing System, and Substrate Processing Method
EBARA CORPORATION
0 cites
US120237772024
Temperature Regulating Apparatus and Polishing Apparatus
EBARA CORPORATION
0 cites
US119929152024
System for Adjusting Pad Surface Temperature and Polishing Apparatus
EBARA CORPORATION
0 cites
US119581612024
Polishing Apparatus Having Surface-property Measuring Device of Polishing Pad and Polishing System
EBARA CORPORATION
0 cites
US119190482024
Method of Cleaning an Optical Film-thickness Measuring System
EBARA CORPORATION
0 cites
US119191242024
Pad-temperature Regulating Apparatus, Method of Regulating Pad-temperature, Polishing Apparatus, and Polishing System
EBARA CORPORATION
0 cites
US118989402024
Leak Detection System and Inspection Method for the System
EBARA CORPORATION
0 cites
US118399472023
Pad-temperature Regulating Apparatus, and Polishing Apparatus
EBARA CORPORATION
0 cites
US118268712023
Pad-temperature Regulating Apparatus, Pad-temperature Regulating Method, and Polishing Apparatus
EBARA CORPORATION
0 cites
US116177332023
Bicyclic Compound and Use Thereof for Medical Purposes
ONO PHARMACEUTICAL CO., Ltd.
0 cites